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Haohai hlau Meterials Co., Ltd.

Haohai Titanium Co., Ltd.


Chaw nyob:

PlantNo.19, TusPark, CenturyAvenue,

XianyangCity, ShaanxiPro., 712000, Suav teb


TEL:

+86 29 3358 2330

+86 29 3358 2349


Fax:

+86 29 3315 9049


E-mail:

INFO@pvdtarget.com

Sales@pvdtarget.com



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029 3358 2330

Xov xwm

Tsev > Xov xwmNtsiab lus

Hlau Sputtering Target Yog Mas Siv Nyob rau hauv Electronics Thiab Cov ntaub ntawv lag luam

Hlau sputtering phiaj yog tsuas yog siv nyob rau hauv electronics thiab cov lus qhia kev lag luam, xws li kev circuits, ntaub ntawv cia, cov kua siv lead ua zaub, laser nco, hluav taws xob tswj pab kiag li lawm, thiab lwm yam.; kuj yuav siv tau nyob rau hauv lub teb ntawm cov iav lo; kuj yuav siv tau nyob rau hauv coj-resistant cov ntaub ntawv, Corrosion, high-qib hniav khoom siv thiab lwm yam lag luam.

Sputtering phiaj kev faib

Raws li rau cov duab yuav tsum tau muab faib mus rau hauv ntev lub hom phiaj, square lub hom phiaj, puag ncig lub hom phiaj, zoo li tus lub hom phiaj

Raws li cov muaj pes tsawg leeg yuav tsum tau muab faib mus rau hauv hlau lub hom phiaj, hlau lub hom phiaj, tej hub compound hom phiaj

Raws li hauv daim ntawv thov ntawm txawv yog muab faib ua semiconductor txog tej hub lub hom phiaj, teev nruab nrab tej hub phiaj, tso saib tej hub phiaj, superconducting tej hub lub hom phiaj thiab giant magnetoresistance tej hub phiaj

Raws li hauv daim ntawv thov teb, nws yog muab faib ua microelectronic lub hom phiaj, magnetic cov ntaubntawv povthawj siv lub hom phiaj, kho qhov muag disc lub hom phiaj, Hlau sputtering phiaj precious hlau lub hom phiaj, nyias zaj duab xis kuj phiaj, conductive zaj duab xis lub hom phiaj, nto hloov lub hom phiaj, daim npog qhov ncauj phiaj, zoo nkauj txheej phiaj, electrode phiaj , pob phiaj, lwm yam hom phiaj

Magnetron sputtering hauv paus ntsiab lus: nyob rau hauv lub sputtering phiaj (cathode) thiab cov anode ntawm ib orthogonal magnetic teb thiab ib tug hluav taws xob field, nyob rau hauv lub siab lub tshuab nqus tsev chamber uas muaj qhov yuav tsum tau inert roj (feem ntau yog Ar gas), ruaj khov magnet nyob rau hauv lub hom phiaj Nplaim cov cov ntaub ntawv uas tsim ib tug sib nqus teb ntawm 250 ~ 350 Gauss, nrog rau cov high voltage fais teb muaj li ntawm orthogonal electromagnetic teb. Nyob rau hauv qhov kev txiav txim ntawm lub electric teb, Ar roj ionization rau hauv zoo ions thiab electrons, Hlau sputtering phiaj ntawm lub hom phiaj ntxiv nrog ib tug tej yam tsis zoo siab, cov electrons tawm txim liab los ntawm lub hom phiaj yog cuam tshuam los ntawm lub magnetic teb thiab lub ionization yuav tshwm ntawm cov ua hauj lwm cov pa roj tsub kom, txoj kev ua ib siab ceev ntshav nyob ze ntawm lub cathode lub cev, Ar ions nyob rau hauv lub luag hauj lwm ntawm Lorentz quab yuam rau accelerate lub davhlau mus rau lub hom phiaj nto, nyob ib siab npaum li cas ntawm bombardment ntawm lub hom phiaj nto, yog li ntawd lub sputtering ntawm lub hom phiaj atoms ua raws li cov momentum hloov dua siab tshiab ntsiab cai nrog ib tug high school cov kev tig tau lub zog los ntawm lub hom phiaj ya lub substrate yog tso thiab tso. Magnetron sputtering yog feem ntau muab faib mus rau hauv ob hom: tributary sputtering thiab RF sputtering, uas tributary sputtering khoom tsis yog yooj yim nyob rau hauv tus, nyob rau hauv lub sputtering ntawm hlau, nws tus nqi yog tseem ceev ceev. Kev siv cov RF sputtering yog ntau uas nws kim heev, Hlau sputtering phiaj nyob rau hauv tas li ntawd mus sputtering conductive khoom, tab sis kuj sputtering uas tsis yog-conductive cov ntaub ntawv, thaum lub sij hawm Department of reactive sputtering kev npaj ntawm oxides, nitrides thiab carbides thiab lwm yam sib txuas. Yog hais tias lub RF zaus nce tom qab ua ib tug microwave ntshav sputtering, kheev siv hluav taws xob cyclotron resonance (ECR) ntaus microwave ntshav sputtering.