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Haohai hlau Meterials Co., Ltd.

Haohai Titanium Co., Ltd.


Chaw nyob:

PlantNo.19, TusPark, CenturyAvenue,

XianyangCity, ShaanxiPro., 712000, Suav teb


TEL:

+86 29 3358 2330

+86 29 3358 2349


Fax:

+86 29 3315 9049


E-mail:

INFO@pvdtarget.com

Sales@pvdtarget.com



Qhov kev pab tus xov tooj neeg
029 3358 2330

Tantalum Sputtering Target, siab Purity, Monolithic, Planar, Cathodic ARC, PVD Coating, nyias zaj duab xis Deposition, Magnetron Ta Sputtering Disavantaged chaw tsim tshuaj paus thiab tsum

Haohai tantalum sputtering lub hom phaj yog yus muaj los ntawm lawv cov microstructure teeb, siab ceev thiab tswj tau kev ntxhib los mos, uas yeej txhawb yam sputtering cov nqi thiab sputtering cwj pwm superior feem ntau, khwv tau zoo kawg nkaus lub koob npe nrov thoob plaws lub ntiaj teb no.

Txhawb tshuaj

TANTALUM SPUTTERING TARGET


Tantalum sputtering lub hom phaj ua tau nyias coatings ntawm tus txheej txheem rau tooj sputtering interconnect metallization, txias magnetic media, tshuab luam ntawv Cheebtsam, CA vaj huam sib luag lus, kho qhov muag thiab muaj iav thiab nyias zaj duab xis resistors.

Haohai tantalum sputtering lub hom phaj yog yus muaj los ntawm lawv cov microstructure teeb, siab ceev thiab tswj tau kev ntxhib los mos, uas yeej txhawb yam sputtering cov nqi thiab sputtering cwj pwm superior feem ntau, khwv tau zoo kawg nkaus lub koob npe nrov thoob plaws lub ntiaj teb no.

Haohai tantalum sputtering lub hom phaj yog tantalum monolithic rotatable sputtering le lub hom phaj, tantalum planar sputtering le lub hom phaj thiab tantalum cathodic lub hom phaj.



Tantalum Monolithic Cylindrical (teb, Rotatable) Sputtering Target

Raug ntau yam

OD (hli)

ID (hli)

Ntev (hli)

Nchuav ua

50 - 300

30 - 280

100 - 3000


Specification

Muaj pes tsawg leeg

Tib

Purity

3.5N (99.95%),4N (99.99%), 4.5N (99.995%)

Ceev

16.6 g/cm3

Qhov ntau thiab tsawg lis

andlt; 80 micron los thov

Muaj dab fabrication

Electron raj nplaim teeb (EB) melting, Forging, Extruding, Machining

Zoo lawm

Ntseg ntseg, aub pob txha

Txoj kev kawg

Khe MIS, SRF, DSF, RFF, WFF, VA, GPI Fixation, Groove kauv, nchuav ua tas lawm

Nto

Ra 1.6 micron los thov

Lwm Specification

Vapor degreased thiab demagnetized tom qab zaum kawg machining

ID ua HONED thiab OD AV tom qab raj nyoos yog uas ua kom daim ID rau OD concentricity raws li drawing.

Khaub tshuab nruj, los tus nqi ntawm tej qhov chaw tsis tau tshaj 1 x 10-8STD CC/SEC.

Ntim rau hauv cov yas, qhwv ua npuas ncauj los tiv thaiv, thiab hnub capped tiv thaiv foob chaw


Qhov ntau thiab tsawg tej

Qeeb mentshis tantalum

Sputtering Target

Qhov ntau thiab tsawg tej

55 hli ID x 70 mm OD x 1334 mm ntev

80 hli ID x 100 hli OD x ntev

125 hli ID x 153 mm OD x 576 mm ntev

125 hli ID x 153 mm OD x 800 mm ntev

125 hli ID x 153 mm OD x 895 mm ntev

125 hli ID x 155 mm OD x 895 mm ntev

125 hli ID x 153 mm OD x 1172 mm ntev

125 hli ID x 153 mm OD x 1676 mm ntev

125 hli ID x 153 mm OD x 1940 mm ntev

125 hli ID x 153 mm OD x 1994 mm ntev

125 hli ID x 153 mm OD x 2420 mm ntev

125 hli ID x 153 mm OD x 3191 mm ntev

125 hli ID x 153 mm OD x 3582 mm ntev

125 hli ID x 153 hli OD x ntev

125 hli ID x 180 mm OD x 624 mm ntev

hli 194 ID x 219 mm OD x 2301 mm ntev



Tantalum Planar (duab plaub, vas) Sputtering Target

Raug ntau yam

Duab plaub

Ntev (hli)

Dav (hli)

Thickness (hli)

Nchuav ua

10 - 2000

10 - 800

1.0 - 25

Yeej

Txoj kab uas hla (hli)


Thickness (hli)

10 - 1000


1.0 - 50


Specification

Muaj pes tsawg leeg

Tib

Purity

3.5N (99.95%), 4N (99.99%),4.5N (99.995%)

Ceev

16.6 g/cm3

Qhov ntau thiab tsawg lis

andlt; 80 micron los thov

Muaj dab fabrication

Electron nqaj (EB) melting,Forging, dov, Machining

Zoo lawm

Phaj, Disc, ruam, nchuav ua

Hom

Monolithic, segmented txuj kev ncau ntau hom

Nto

Ra 1.6 micron los thov

Lwm Specifications

Peb yuav tsum lis huas hauv seem siv txuj kev ncau ntau segmented.

Flatness, ntxuav deg, polished, dawb speed, roj, teev, thiab lwm yam.




Tantalum arc cathodes

Peb muab Tantalum arc teb thiab planar cathodes thiab li teb thiab planar sputtering le lub hom phaj




Peb cov Tantalum Sputtering Target thiab Arc Cathodes


Kam rau ua

Acc. drawings los ntawm kev thov.


Yog xaiv purity seb cov nqi sib txawv thiab raws li daim phiaj. Purity yog ntsuas los ntawm ntshav DC thiab gasses muaj li ntawm LECO analyzers. Xav paub kom tseeb kuaj los ntawm GDMS (Glow raws pawg Spectrometry) yog muaj.


Impurities ntsiab lus [ppm]

Purity [%]

Ntsiab

3N5

[99.95]

4N

[99.99]

4N5

[99.995]

Nws yog xim hlau Impurities [μg/g]

Al

10

1

0.5

Ca

10

1

1

Cl

3

1

1

Pa roj carbon monoxide

10

1

0.5

Cr

10

1

0.5

Cu

5

1

0.5

Fe

50

5

1

K

2

0.4

0.1

Lis

1

0.5

0.05

MG

10

1

0.5

MN

10

1

0.5

Mo

50

10

10

Naj

1

0.4

0.4

Nb

300

100

50

Ni

20

5

1

Pb

5

1

1

Si

10

1

0.5

Sn

10

1

1

Ti

10

1

1

V

5

1

1

W

150

80

50

Zn

5

1

1

Zr

20

5

1

Cov-nws yog xim hlau Impurities [μg/g]

C

40

30

30

O

100

80

80

H

10

10

5

N

40

20

20

S

10

5

1

Ntom Admininistrative [g/cm3]

16.6

16.6

16.6

Lis me me [μm]

100

100

100

Thermal Conductivity [W/(m.K)]

max.60

max.60

max.60

Coefficient ntawm thermal expansion [1/K]

6.3-6

6.3-6

6.3-6

Daim ntawv

Cheeb tsam loj iav txheej

Hnav Resistant txheej

Txheej kho qhov muag

Conductive ib



Haohai hlau, nruab nrog kev hoobkas, yog ib tug ua manufacturers thiab lwm tus neeg ntawm ntau ntau thiab tsawg ntawm bonding khoom. Peb yog ib tug tantalum sputtering phiaj, siab purity, arc monolithic, planar, cathodic, pvd txheej, nyias zaj duab xis deposition, magnetron tib sputtering chaw tsim tshuaj paus rua lub hom phaj thiab tsum. Txais tos kom yuav thiab wholesale peb cov khoom uas tsis muaj nqi, rau siab pab, purity siab thiab zoo nrog peb producers.

Hot Tags: tantalum sputtering phiaj, siab purity, monolithic, planar, cathodic ARC, PVD txheej, nyias zaj duab xis deposition, magnetron Ta sputtering le lub hom phaj chaw tsim tshuaj paus thiab tsum, manufacturers, lwm tus neeg, hoobkas, producers, theem muag tag nrho, nqe, muas, loj, me, tsevneeg, zoo, siab purity, rau siab pab
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