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Haohai hlau Meterials Co., Ltd.

Haohai Titanium Co., Ltd.


Chaw nyob:

PlantNo.19, TusPark, CenturyAvenue,

XianyangCity, ShaanxiPro., 712000, Suav teb


TEL:

+86 29 3358 2330

+86 29 3358 2349


Fax:

+86 29 3315 9049


E-mail:

INFO@pvdtarget.com

Sales@pvdtarget.com



Qhov kev pab tus xov tooj neeg
029 3358 2330

Silicon Sputtering le lub hom phaj, siab Purity, Monolithic, Planar, Disc, N-yam Doping, tsevneeg, PVD Coating, nyias zaj duab xis Deposition, Magnetron Si Sputtering Disavantaged chaw tsim tshuaj paus thiab tsum

Haohai muaj Silicon Sputter Target, Boron mus yuav doped tag Silicon Sputter phiaj rau nyias zaj duab xis thiab daim ntaub ntawv txheej xws li Optical, cheeb tsam loj iav txheej (tsawg-E) rau architecture, automotive iav, kov iav muaj vaj huam sib luag (AR).

Txhawb tshuaj

SILICON SPUTTERING TARGET

Haohai muaj Silicon Sputter Target, Boron mus yuav doped tag Silicon Sputter phiaj rau nyias zaj duab xis thiab daim ntaub ntawv txheej xws li Optical, cheeb tsam loj iav txheej (tsawg-E) rau architecture, automotive iav, kov iav muaj vaj huam sib luag (AR).

HaohaiSiliconXws li lub hom phaj sputteringSiliconRotatable sputtering le lub hom phaj thiabSiliconplanar sputtering le lub hom phaj.



Silicon Rotatable (teb, Cylindrical) Sputtering Target


Raug ntau yam

OD (hli)

ID (hli)

Ntev (hli)

Nchuav ua

80 - 160

60 - 125

100 - 4000

Specification

Muaj pes tsawg leeg

Si

Purity

3N (99.9%)

Ceev

2.33 g/cm3

Qhov ntau thiab tsawg lis

andlt; 150 micron los thov

Muaj dab fabrication

Casting, HPS, ntshav txau, Machining

Zoo lawm

Ncaj, aub pob txha

Txoj kev kawg

Khe MIS, SRF, DSF, RFF, WFF, VA, GPI Fixation, Groove kauv, tas lawm

Nchuav rau SS Backing Tube

Nto

Ra 1.6 micron

Lwm Specification

Vapor degreased thiab demagnetized tom qab machining kawg.

ID ua HONED thiab OD AV tom qab raj nyoos yog uas ua kom daim ID rau OD concentricity raws li drawing.

Khaub tshuab nruj, los tus nqi ntawm tej qhov chaw tsis tau tshaj 1 x 10-8STD CC/SEC.

Ntim rau hauv cov yas, qhwv ua npuas ncauj los tiv thaiv, thiab hnub capped tiv thaiv foob chaw.


Silicon Planar (duab plaub, vas) Sputtering Target

Raug ntau yam

Duab plaub

Ntev (hli)

Dav (hli)

Thickness (hli)

Nchuav ua

10 - 2000

10 - 300

5.0 - 40

Yeej

Txoj kab uas hla (hli)


Thickness (hli)

5.0 - 300


5.0 - 40


Specification

Muaj pes tsawg leeg

Si (yuav tau Boron doped)

Purity

3N (99.9%)4N (99.99%), 5N (99.999%)

Ceev

2.33 g/cm3

Qhov ntau thiab tsawg lis

andlt; 150 micron los thov

Muaj dab fabrication

Casting, Machining, Bonding

Zoo lawm

Txuj kev ncau ntau segmented Target, Bonding rau Cu Backing phaj

Hom

Phaj, Disc, ruam, los bolting, Threading, nchuav ua

Nto

Ra 1.6 micron

Lwm Specifications

Flatness, du ntxuav qhov chaw, polished, dawb speed, roj, teev, thiab lwm yam.

Ted conductions, me me tawm expansion coefficient thiab zoo thaum tshav kub kub-kuj.



Rau Haohai Silicon sputtering le lub hom phaj

ToleranWIC

Acc. drawings los ntawm kev thov.

Ntau lawm sputtering le lub hom phaj ntawm undoped los yog Boron doped Silicon yog li CZ ingots nrog soj lus annealing, khoom, loj hlob tej thiab machining.

Backing daim hlau thiab Bonding pab

Haohai muab ntau txheem OFHC tooj backing daim hlau rau sputtering heev thiab cathodic arc deposition tshuab, raws li kev cai designs. Vuas ob nws yog xim hlau thiab Epoxy Bonding of Silicon yog muaj.

Impurities ntsiab lus [ppm]

Silicon ntawv [ppm]


Si

Purity [%]


99.9

Nws yog xim hlau Impurities [ppm]

Al

500

Ca

25

Cr

30

Cu

50

Fe

150

MN

20

Ni

30

Cov-nws yog xim hlau Impurities [ppm]

N

300

O

6000

Resistivity [ohm.cm] 20


andlt; 20

Ntom Admininistrative [g/cm3]


2.2

Lis me me [μm]


150


Daim ntawv

Cheeb tsam loj iav txheej

Tso saib kev lag luam

Txheej kho qhov muag

Andamp hnub ci; Photovoltaic kev lag luam



Haohai hlau, nruab nrog kev hoobkas, yog ib tug ua manufacturers thiab lwm tus neeg ntawm ntau ntau thiab tsawg ntawm bonding khoom. Peb yog ib tug silicon sputtering lub hom phaj, purity siab, monolithic, planar, disc, n-yam doping, tsevneeg, pvd txheej, nyias zaj duab xis deposition, magnetron si sputtering le lub hom phaj chaw tsim tshuaj paus thiab tsum. Txais tos kom yuav thiab wholesale peb cov khoom uas tsis muaj nqi, rau siab pab, purity siab thiab zoo nrog peb producers.

Hot Tags: silicon sputtering lub hom phaj, purity siab, monolithic, planar, disc, N-yam doping, tsevneeg, txheej PVD, nyias zaj duab xis deposition, magnetron si sputtering le lub hom phaj chaw tsim tshuaj paus thiab tsum, manufacturers, lwm tus neeg, hoobkas, producers, wholesale, nqe, muas, loj, me, tsevneeg, zoo, siab purity, rau siab pab
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